Instrument & System Options

The HEX series of thin film PVD systems have a wide range of deposition sources and instruments available including; single and four pocket e-beam evaporators, RF and DC magnetron sputtering sources, thermal evaporation sources, organic low temperature sources, in-situ measurement equipment and quartz crystal monitors. The HEX platform also allows for various sample stage configurations including heating, rotating, cooling, temperature gradient and static options.

Due to the systems flexibility and broad range of standard instrumentation, the HEX can provide the solution to a variety of coating and research applications, whilst maintaining a compact footprint and user friendly operation. The unique modular design also means that custom panels such as PLD and Spectroscopy interfaces can be created quickly and simply.

Please see the links below for more details regarding our DC & RF Sputtering, EBeam, Organic and Thermal sources and also thin film accessories such as in-situ measurement and integrated load locks, contact us for further information and data, or download our brochure here.