Thermal evaporation sources are generally used for basic thin film deposition processes. The evaporant material is placed in a conductive boat or alternatively a crucible held in a resistive coil. The boat or coil is heated by passing a high electrical current through it. As the temperature of the boat rises, the material in the boat begins to evaporate. The temperature, and hence the evaporation rate of the material, is controlled by the amount of applied current.
One important advantage of thermal evaporation is that no process gas is required so the process can be performed under very high vacuum conditions resulting in very few impurities being incorporated into the deposited films.
TES – Thermal Evaporation Source
The Korvus TES thermal boat sources allow quick removal of the sources to allow replenishment of the evaporant material. Boats and filaments can also be easily and rapidly replaced.
The TES sources are available as a single-source per flange unit. Optionally, thermocouples may be mounted to monitor the boat temperature. Each source can be equipped with a manual or automatic shutter.
Up to five single sources may be accommodated in one system. The sources can also be used in conjunction with other techniques such as sputtering, e-beam deposition and low-temperature sources.