Korvus Technology

The HEX Thin Film PVD System

Physical Vapour Deposition Systems

Physical vapour deposition (PVD) systems, sometimes called thin film deposition or physical vapour transport systems, employ vacuum deposition methods to produce multiple layers of thin coating materials on certain substrates. It’s often used to apply thin film coatings to substrate material such as glass, ceramics, metals, and polymers.

The thin film PVD system process involves the transition of a source material, such as pure metal, from a condensed phase to a reactive gas phase. After this chemical reaction, the material transitions back to a solid material to create thin films (the thin film condensed phase) [1]. The substrate surface itself is extremely thin, with a film thickness of a few nanometres to several micrometres.

Manufacturers can use physical vapour deposition to make a very thin film with chemical, electric, acoustic, mechanical, or optical properties. The process is more environmentally friendly than some other coating processes, too [2]. Thin film deposition techniques and PVD processes can be used to make optical thin films for:

  • Silicon wafer biomedical implants
  • Power supplies
  • Optical filters
  • Silicon dioxide for consumer electronics
  • Highly durable solar panels and solar cells
  • Thin film bulk acoustic resonators
  • RF power transistors
  • Mass flow controllers
  • Focal plane arrays
  • Decorative coatings
  • Aluminised coating material for balloons
  • Food packaging that can prevent oxidation
  • Semiconductor devices
  • Titanium nitride-coated, corrosion-resistant cutting tools
The HEX benchtop PVD system

Applications of PVD Systems in Thin Film Deposition

PVD systems can be used for a number of thin film deposition processes. Primary methods of deposition with a thin film PVD system include:

  • Sputtering: This thin film deposition process involves bombarding the substrate surface of a target material with a glow plasma charge to create vapour in a process chamber, which manufacturers use to make thin films [3].
  • Thermal evaporation: This PVD method uses thermal evaporation to coat a substrate in a vacuum chamber with an evaporated material via exposure to a resistive heat source.
  • Pulsed laser deposition: In a laser deposition process chamber, pulsed laser deposition ablates a target material and turns it into vapour through chemical reactions.

Expand Your Capabilities With Our Custom Solutions

Korvus Technologies provides fully customisable physical vapour deposition (PVD) systems that manufacturers in many industries can use to produce thin films and PVD coating through various thin film deposition techniques. Through stringent process control, our experienced team will customise your system to ensure that it meets your needs.

We offer two thin film HEX systems to choose from: HEX and HEX-L. Both provide the highest-quality thin films, and both can are suitable for glovebox integration. Both units feature accessible chamber panels for quick access to your substrate material.

Each system has a few key differences to be aware of to help you choose between HEX vs HEX-L and select the right thin film deposition system for you.

The HEX is a compact system for benchtop use or rack mounting. Specifications include:

  • Up to three thin film deposition sources
  • 4-inch (100mm) maximum sample size diameter
  • 12L chamber volume
  • 9×10 -7 base pressure
  • No loadlock option

The HEX-L is a larger mobile base-stand-mounted system for creating thin films from a solid source. Specifications include:

  • Up to six thin film deposition sources
  • 6-inch (150mm) maximum sample size
  • 50L chamber volume
  • 9×10 -7 base pressure
  • Loadlock option

Customisation options include:

  • An ORCA organic deposition source for precise control over thin films and film thickness
  • TAU mini E-beam evaporators to help you produce very thin films with reliable process control
  • A FISSION source for RF and DC sputtering with a high level of dimensional stability
  • A TES thermal boat source for chemical deposition of a variety of source material, such as organics/polymers and metals
Korvus Exploded HEX View

We'd Love To Understand What You're Looking For

Since every situation is unique, reach out to our team today, and let’s collaborate to discover the optimal solution for you.

Additional Sources For Our HEX Sputtering System

TAU E-Beam Evaporation System

ORCA Organic Evaporation System

TES Thermal Evaporation System

Frequently Asked Questions

The thin film deposition process works in one of two ways: chemical or physical processes. Chemical deposition changes the elemental composition of materials to gas to produce a thin layer, or thin film, on a substrate surface. Atomic layer deposition is a variant of chemical vapour deposition. In the physical vapour deposition process, materials are still in their solid forms as they are deposited on a substrate.

Manufacturers use thin films to change the qualities of a product. For instance, thermal evaporation, reactive gas, or atomic layer deposition can change the electrical conductivity of a substrate or make it more durable [4]. Learn more about thin film deposition.

A wide range of industries can benefit from PVD substrate coating. Some industries that use thin film deposition technologies include the aerospace, healthcare, automotive, and textile industries [5]. Any industry that wants to improve durability or prevent oxidisation of a substrate can benefit from PVD coating.

Thin film coating technology has many uses and applications. Manufacturers commonly use the deposition process to make optical films for mirrors and telescopes. Thin films for mobile phone receivers, Bluetooth modules, and wireless routers are other examples of thin film applications. Implantable medical devices require thin-film batteries. Manufacturers of drug delivery systems, biosensors, and tissue engineering technology commonly use polymer thin film coatings.

The HEX thin film system is unique because, unlike many other thin film deposition systems, it’s easy to customise and offers thermal evaporation, sputtering, sample preparation, and organic physical vapour deposition. The HEX’s glovebox integration capability can save room and greatly reduce contamination risks.

Learn more about our HEX or HEX-L thin film PVD system, or contact us to start your project today.