Automation Software

Instruments & Software

Niobium Software

The custom software supplied with the HEX range enables full recipe control and allows multiple users to create complex deposition runs in a matter of minutes.

The modular software is designed to control and automate the use of all Korvus deposition sources, systems and processes, and allows for seamless integration of system upgrades in the future.

The functions available include:

  • Shutter operation
  • Sample rotation
  • Sample heating
  • Pump activation and speed control
  • Load-lock pump down and vent control
  • Valve control
  • Chamber pressure control
  • Thickness measurement and rate monitoring
  • Power control for all sputtering and thermal sources
  • Gas flow control
  • Custom program creation for specific deposition runs
  • Data logging