Thin Film Deposition of 2D Materials: How PVD is Driving the Next Generation of Materials Research
Physical vapour deposition (PVD) has emerged as one of the most powerful tools for meeting that challenge. Techniques
Sample Stages
KORVUS TECHNOLOGY
Sample Stage Options
The HEX sample stage is fitted with an outer clamp ring for holding wafers, in addition to including holes for the individual clamping of smaller samples.
Sticking with the modular design philosophy of the HEX system, the sample stages are fully interchangable, so a static sample stage could easily be switched with, for example, a rotating heating bias table, with no specialist engineer assistance required.
The options available are:
- Rotation
- Heating (max temp 500-800 ºC)
- RF biasing
- Indirect Water Cooling
- Cryogenic cooling (without rotation)
- Variable incidence stages
All heated and rotating stages can be configured with z-shift and sample hand-off facility.
THE HEX SERIES
Complete Flexibility and Modularity
Sample Stages
ROTATING & HEATING STAGE
The stage may be upgraded to one which incorporates sample rotation and heating.
The rotation improves the film uniformity dramatically and is recommended for samples with dimensions greater than 15mm and/or where good uniformity is important. We also utilise a stepper motor to provide discrete rotational steps for the generation of composite films/wedges.
The stage has various heating options with max temperatures between 500-800C, which will improve film morphology for some materials. Due to PID technology, this temperature is accurately controlled to within one degree.
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