Automation Software
Instruments & Software
Niobium Software
The custom software supplied with the HEX range enables full recipe control and allows multiple users to create complex deposition runs in a matter of minutes.
The functions available include;
- Shutter operation
- Gas flow control
- Valve control
- Custom programme creation for specific deposition runs
- Thickness measurement and rate monitoring
- Sample rotation
- Logging
- Load lock pump down and venting
- Chamber pressure control
- Pump control
- Sample heating
- Power control for all sputtering and thermal sources
