HEX Steel

HEX Steel beside HEX-L Steel
THE HEX SERIES

Chamber material to suit your research

Although we are strong believers in the benefits of aluminium as the material of choice for a PVD chamber, we realise that there are some benefits to utilising stainless steel chambers:

  • Enhanced chemical and corrosion resistance
  • Higher thermal stability
  • Increased durability
  • Potential to bake out
KORVUS TECHNOLOGY

Different material, same modularity

The HEX Steel is available for both the HEX and HEX-L variants and offers exactly the same modularity as the aluminium based systems.

Each panel is sealed via an o ring, and is detachable. The only significant difference is the securing of the chamber to the electronics rack or base stand due to its increased weight and higher safety concerns.

Korvus Technology

Customise With Sources

Most thin film deposition systems have limited functionality. The HEX series adapts to your needs. We have several deposition sources to customise the sources used in the system, whether you opt for a stainless steel or aluminium chamber.
 

Magnetron Sputtering Scource

FISSION- Magnetron Sputtering Source

Designed for 2″, 3″ and 4″ diameter targets, the sputter sources are equipped with SmCo magnets and accept targets with thickness ranging from 0.5 to 6mm of non-magnetic materials and up to 1mm for magnetic materials. The most flexible source, the FISSION can be paired with DC, RF, HiPIMS, Pulsed-DC and more…
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low temperature evaporation

ORCA - Low Temperature Evaporation

The ORCA organic deposition source is designed to operate between 50 and 600 C to allow sensitive organic materials to be evaporated with precise control. This source can also be used to evaporate low-temperature metals such as Lithium, and pairs well with the glovebox integration of the HEX Series.
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electron beam evaporation

TAU - Electron Beam Evaporation

Our high-accuracy (sub-monolayer) mini E-beam evaporators are ideal for ultra-thin film deposition of high-temperature metals with reliable process control. Material can be evaporated from rods or material held in a crucible. Our novel design allows the material to be co-deposited from four individual pockets.
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thermal boat evaporation

TES - Thermal Boat Evaporation

The single thermal boat source from Kovus Technology allows for the integration of a range of thermal boats for the deposition of metals. This allows for an extremely inexpensive, very robust and effective source, the TES is also ideal for those who want to thermally evaporate standard metals.
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