Korvus Technology


System Applications

Due to the versatility and flexibility of the the HEX series, the systems are ideal for many research and training applications. The modular design allows the system to be reconfigured in minutes and ensures that it can be used for a variety of deposition applications with minimum effort. Thin film deposition has a range of applications in various fields; keep up-to-date with our articles where you can explore the uses in depth, such as thin-film batteries and solar cells.

Some of the thin film system options are listed below, but please contact us if you have any specific requirements and we will be happy to design a configuration to suit your requirements.

The extensive range of deposition sources, sample stages and accessories in the HEX range, including single and four pocket electron beam evaporators, low temperature organic evaporators, RF and DC sputtering sources (including HiPIMS) and in-situ measurement options, ensure that the HEX series can provide solutions for a wide variety of coating and research applications.

Thin Film Training

The HEX series has been developed with student training in mind. Its modular construction allows various key elements to be exposed, discussed and interacted with, enabling student laboratories to fully explore the mechanical, material and growth elements of thin film research and nanomaterials.

The HEX’s ability to be quickly reconfigured at low additional expense allows the system to provide simple thin film training on a reproducible and recognizable platform for various deposition/coating techniques ranging from sample preparation for surface analysis to e-beam, sputtering, thermal, organics (for OLED research) and a range of other thin film deposition techniques.

All connectors/fixings on the system and the sources, including gas and water flow, are quick connects allowing for the elimination of most tools during system operation and sample/target changes.The system’s compact footprint and the option to have it either bench, rack or frame mounted make it an ideal size for any teaching environment and enables simple transfer to other laboratories/departments where necessary.

System Customisations

One of the main benefits of the HEX Series is the freedom it gives users to customize and add third-party components to their chamber. With conventional PVD systems, the single-piece metal vacuum chamber prohibits the retrofitting of new ports and flanges. Once you purchase a conventional chamber, it is fixed in that state.

With the HEX Series, the detachable side panels mean that the architecture of the chamber can be changed at any time. Panels with customised flange ports with customised positions can easily be added by researchers. 

Korvus has allowed researchers to attach CF flange ports to a HEX system for vacuum suitcase transfer (left) and facilitated the addition of in-situ ellipsometry and microwave plasma sources to a HEX-L (above).

HEX Series- Clustering

In addition to supporting modular instruments and panels, the HEX Series systems are themselves modular. These systems facilitate stacking and clustering in various configurations. This provides an efficient, cost-effective way to incorporate different-sized cluster chambers into your research, which can all be done after the purchase of an initial HEX.

Clustering can be useful for a variety of reasons: such as increasing source-sample distance for sensitive substrate materials, maintaining a high-vacuum environment and transferring a sample between various chambers that you would not wish to contaminate each other (those that use such materials as organics, metals, oxides, etc…), and much more.

Get in contact with one of our technical team to learn more!