Korvus Technology


System Applications

Due to the versatility and flexibility of the he HEX series, the systems are ideal for many research and training applications. The modular design allows the system to be reconfigured in minutes and ensures that it can be used for a variety of deposition applications with the minimum of effort. Thin film deposition has a range of applications in various fields; keep up-to-date with our articles where you can explore the uses in depth, such as thin-film batteries and solar cells.

Some of the thin film system options are listed below, but please contact us if you have any specific requirements and we will be happy to design a configuration to suit your requirements.

The extensive range of depsoition sources, sample stages and accessories in the HEX range, including single and four pocket ebeam evaporators, low temperature organic evaporators, RF and DC sputtering sources (including HiPims) and in-situ measurement options ensure that the HEX series can provide the solution a wide variety of coating and research applications.

Typical Applications

  • Sample preparation
  • R & D development of new coatings
  • Electrical contacts
  • Sputter deposition
  • Teaching and training
  • Lift-off
  • Inert atmosphere – glove box integration
  • Optical coatings

Thin Film Training

The HEX series has been developed with student training in mind. Its modular construction allows various key elements to be exposed, discussed and interacted with, enabling student laboratories to fully explore the mechanical, material and growth elements of thin film research and nanomaterials.

Ease of Use

The HEX’s ability to be quickly reconfigured at low additional expense allows the system to provide simple thin film training on a reproducible and recognizable platform for various deposition/coating techniques ranging from sample preparation for surface analysis to e-beam, sputtering, thermal, organics (for OLED research) and a range of other thin film deposition techniques.

All connectors/fixings on the system and the sources, including gas and water flow, are quick connects allowing for the elimination of most tools during system operation and sample/target changes.The system’s compact footprint and the option to have it either bench, rack or frame mounted make it an ideal size for any teaching environment and enables simple transfer to other laboratories/departments where necessary.


System Options

The systems in the HEX series can be configured for RF & DC Sputtering, HiPims, PLD, E-Beam, Organic, and Thermal Evaporation. The chambers can also be integrated into a glovebox for research in an inert atmosphere and can be equipped with various in-situ measurement interfaces and high vacuum load locks, ensuring an extensive range of training options both in thin film deposition and sample analysis.