HEX Mini

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THE HEX MINI

Single Source Desktop PVD Coater

HEX Mini Bencthop PVD System Side on Shot
HEX Mini Bencthop PVD System Front on Shot
HEX Mini Bencthop PVD System Angled Shot

The HEX Mini is Korvus Technology’s compact, entry-level PVD (physical vapour deposition) system for the production of thin films. Applications include optical coatings, sample preparation for SEM/TEM and electrical contacts.

A “plug-and-play” deposition system with quick setup times, HEX Mini offers researchers in materials science, physics and microscopy the ability to make high-quality coatings in a compact and user-friendly system, without compromising performance.

The benchtop HEX Mini can be configured with either a 2” DC (direct current)sputtering source or a thermal evaporation source. Choice of deposition method will depend on users’ material, desired yield, uniformity and sample sensitivity.

Mini-S

Turbopumped DC Sputter System

  • Maximum Sample Size (Diameter): 2" (50mm)
  • Source: DC Sputtering
  • Magnetron Sputter Size (Diameter): 2"
  • Power Supply: 208W, 650V / 0.32A
  • Base Pressure: <5×10-6 mbar*
  • Chamber Volume: 3 L

*Ultimate base pressure is on factory tested systems. Subsequent base pressure depends on a variety of factors such as chamber cleanliness, user operation and lab environment.

Mini-T

Turbopumped Thermal Evaporation System

  • Maximum Sample Size Diameter: 2" (50mm)
  • Source: TES Thermal Evaporator
  • Power Supply: 720W, 72A / 10V
  • Base Pressure: <5×10-6 mbar*
  • Chamber Volume: 3 L
  • Optional Thickness Monitoring
HEX Mini Bencthop PVD System Angled Shot

*Ultimate base pressure is on factory tested systems. Subsequent base pressure depends on a variety of factors such as chamber cleanliness, user operation and lab environment.

HEX Mini FAQs

Applications of the HEX Mini include:

  • SEM sample preparation (Sputtering & Carbon Evaporation)
  • X-Ray Microanalysis sample preparation (Carbon Evaporation)
  • High resolution sample preparation
  • High purity metal contacts
  • Semiconductors
  • Geology
  • Forensics
  • Material science
  • Medicine
  • Life science

The only difference between the two models are that one has a DC magnetron source and the other one has a thermal evaporation source. The Mini-T can also facilitate an optional thickness monitor. 

Yes, the HEX Mini can be used for all sample preparation needs, including SEM coating, and is capable of creating high quality films. However, the HEX Mini is not a focused SEM coater as it is much higher spec and can be used for more demanding applications too.

The HEX is also a benchtop PVD system but is a larger system than the Mini and includes an electronics rack. The HEX Mini is all incorporated within the single frame and chamber. The HEX Mini can be used for samples up to 2″ too and is only single source. The HEX can accomodate up to three sources and a QCM. Additionally, due to increased chamber size, the HEX offers more opportunities for customisation.