Highly Modular PVD Systems

HIGHLY MODULAR PVD SYSTEMS

With their uniquely modular design, the HEX Series offer an unmatched level of user control, customisation and upgradability to researchers in thin-film deposition.

THE HEX SERIES

KORVUS TECHNOLOGY

The HEX Series offer an unmatched level of user control and customisation, designed to incorporate the latest thin film technologies and performance into a PVD (Physical Vapour Deposition) system.

In contrast to conventional PVD chambers, the open-frame architecture of the HEX Series gives users the freedom to reconfigure, upgrade and add their own instruments.

The modular nature of the HEX Series’ design mean that panels can be mounted onto the frame in a matter of minutes, with no specialist tools.

The HEX Series is compatible with a range of deposition sources, such as four pocket electron beam evaporation and sputtering, as well as sample holder types.

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KORVUS TECHNOLOGY

THE HEX SERIES

The HEX Series includes 3 highly modular systems, the benchtop HEX and the larger HEX-L and HEX-XL Systems. (See “HEX vs HEX-L vs HEX-XL page)

HEX

Benchtop or rack-mounted compact system

HEX - L

Mobile base-stand-mounted system

HEX - XL

Larger mobile base-stand-mounted system

Korvus Technology

DEPOSITION SOURCES

FISSION- Magnetron Sputtering Source

Designed for 2″, 3″ and 4″ diameter targets, the sputter sources are equipped with SmCo magnets and accept targets with thickness ranging from 0.5 to 6mm of non-magnetic materials and up to 1mm for magnetic materials. The most flexible source, the FISSION can be paired with DC, RF, HiPIMS, Pulsed-DC and more…

ORCA - Low Temperature Evaporation

The ORCA organic deposition source is designed to operate between 50 and 600 C to allow sensitive organic materials to be evaporated with precise control. This source can also be used to evaporate low-temperature metals such as Lithium, and pairs well with the glovebox integration of the HEX Series.

TAU - Electron Beam Evaporation

Our high-accuracy (sub-monolayer) mini E-beam evaporators are ideal for ultra-thin film deposition of high-temperature metals with reliable process control. Material can be evaporated from rods or material held in a crucible. Our novel design allows the material to be co-deposited from four individual pockets.

TES - Thermal Boat Evaporation

The single thermal boat source from Kovus Technology allows for the integration of a range of thermal boats for the deposition of metals. This allows for an extremely inexpensive, very robust and effective source, the TES is also ideal for those who want to thermally evaporate standard metals.