Discover A Unique

Benchtop Coating System

Korvus Technology offer two options for benchtop coating systems.

The HEX Mini, available in either DC sputtering or Thermal Evaporation models, or the HEX deposition system, a larger unit which is capable of accomodating up to three deposition sources and a QCM.

Korvus Technology

Expand Your Range of Deposition Capabilities

The HEX PVD coating system is lightweight and equipped with six modular aluminium panels, gas ports, and a full range of customisable source options. Regardless of their chosen applications, users can quickly reconfigure components on HEX systems without hassle.
 

Magnetron Sputtering Scource

FISSION- Magnetron Sputtering Source

Designed for 2″, 3″ and 4″ diameter targets, the sputter sources are equipped with SmCo magnets and accept targets with thickness ranging from 0.5 to 6mm of non-magnetic materials and up to 1mm for magnetic materials. The most flexible source, the FISSION can be paired with DC, RF, HiPIMS, Pulsed-DC and more…
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low temperature evaporation

ORCA - Low Temperature Evaporation

The ORCA organic deposition source is designed to operate between 50 and 600 C to allow sensitive organic materials to be evaporated with precise control. This source can also be used to evaporate low-temperature metals such as Lithium, and pairs well with the glovebox integration of the HEX Series.
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electron beam evaporation

TAU - Electron Beam Evaporation

Our high-accuracy (sub-monolayer) mini E-beam evaporators are ideal for ultra-thin film deposition of high-temperature metals with reliable process control. Material can be evaporated from rods or material held in a crucible. Our novel design allows the material to be co-deposited from four individual pockets.
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thermal boat evaporation

TES - Thermal Boat Evaporation

The single thermal boat source from Kovus Technology allows for the integration of a range of thermal boats for the deposition of metals. This allows for an extremely inexpensive, very robust and effective source, the TES is also ideal for those who want to thermally evaporate standard metals.
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Korvus Technology

FAQs About The HEX Benchtop PVD System

How Does Thin Film Deposition Work?

Thin film deposition is a process used to create very thin layers of material—ranging from a few nanometers to several micrometers thick—on a substrate surface. These films are essential in many technologies, including semiconductors, optics, solar cells, and sensors.

Learn more about thin film deposition.

The bench-top HEX machine supports four primary ultrasonic coating techniques:

  • Sputtering (including RF and DC magnetron sputtering)
  • Thermal evaporation
  • E-beam evaporation
  • Organic evaporation.

An operator can use one or multiple techniques within a single process chamber, depending on their chosen applications. 

Thin film coatings are used to modify the properties of the surface material for a variety of applications. Learn about thin film applications.

The HEX system is a completely unique product due to its open frame architecture, allowing easy upgrades and modification. It can support multiple deposition sources in one chamber.

Contact Korvus Technology Ltd online to learn more about the benchtop HEX system.