The HEX Series - Compact PVD Systems

THE HEX SERIES

Precision Coating Technology in a Space-Efficient Design

Space-Efficient Engineering

Our compact design reduces the footprint by up to 40% compared to traditional PVD systems, making it ideal for laboratories and facilities with limited space. Despite its smaller size, the system maintains full deposition capability and process versatility.

Industrial Performance

Don't let the size fool you. This system delivers the same coating quality, uniformity, and repeatability as larger industrial platforms, with deposition rates optimized for both research and small-batch production requirements.

Flexible Configuration

The modular architecture allows for customization based on your specific needs. Choose from multiple source configurations, substrate holders, and process monitoring options to create a system tailored to your applications.

Cost-Effective Solution

Lower initial investment and reduced operational costs make this system an economical entry point into PVD technology, while maintaining the capability to scale as your needs grow.

KORVUS TECHNOLOGY

Why Choose Our Compact PVD System?

Advanced Vacuum Technology High-performance pumping systems achieve base pressures in the 10⁻⁶ mbar range, ensuring optimal deposition conditions and film quality.

Multiple Deposition Sources Compatible with thermal evaporation, electron beam evaporation, and sputtering sources. Configure with single or multiple sources for co-deposition and multi-layer applications.

Precision Process Control Integrated control systems monitor and regulate all critical parameters including pressure, temperature, deposition rate, and film thickness in real-time.

Substrate Heating & Cooling Temperature control from ambient to 500°C enables optimization of film properties for diverse material systems.

Quick Access Chamber Ergonomic chamber design facilitates rapid sample loading and unloading, minimizing downtime between deposition runs.

Comprehensive Safety Features Built-in interlocks, pressure relief systems, and automated safety protocols ensure safe operation in all conditions.

Applications

Research & Development

  • Material science research
  • Novel coating development
  • Process optimization studies
  • Academic research programs

Electronics & Semiconductors

  • Contact metallization
  • Barrier layers
  • Conductive thin films
  • Prototype device fabrication

Optics & Photonics

  • Anti-reflection coatings
  • Mirror coatings
  • Optical filters
  • Beam splitters

    Medical & Biomedical

    • Biocompatible coatings
    • Implant surface modification
    • Diagnostic device components
    • Research tool coatings

    Specialized Manufacturing

    • Decorative coatings
    • Wear-resistant layers
    • Small-batch production
    • Custom coating services
    Korvus Technology

    Customise With Sources

    Most thin film deposition systems have limited functionality. The HEX series adapts to your needs. We have several deposition sources to customise the sources used in the system, whether you opt for a stainless steel or aluminium chamber.
     

    Magnetron Sputtering Scource

    FISSION- Magnetron Sputtering Source

    Designed for 2″, 3″ and 4″ diameter targets, the sputter sources are equipped with SmCo magnets and accept targets with thickness ranging from 0.5 to 6mm of non-magnetic materials and up to 1mm for magnetic materials. The most flexible source, the FISSION can be paired with DC, RF, HiPIMS, Pulsed-DC and more…
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    low temperature evaporation

    ORCA - Low Temperature Evaporation

    The ORCA organic deposition source is designed to operate between 50 and 600 C to allow sensitive organic materials to be evaporated with precise control. This source can also be used to evaporate low-temperature metals such as Lithium, and pairs well with the glovebox integration of the HEX Series.
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    electron beam evaporation

    TAU - Electron Beam Evaporation

    Our high-accuracy (sub-monolayer) mini E-beam evaporators are ideal for ultra-thin film deposition of high-temperature metals with reliable process control. Material can be evaporated from rods or material held in a crucible. Our novel design allows the material to be co-deposited from four individual pockets.
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    thermal boat evaporation

    TES - Thermal Boat Evaporation

    The single thermal boat source from Kovus Technology allows for the integration of a range of thermal boats for the deposition of metals. This allows for an extremely inexpensive, very robust and effective source, the TES is also ideal for those who want to thermally evaporate standard metals.
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