Desktop Coater

The HEX Mini is a compact, entry-level desktop PVD coater designed for the deposition of metals and simple materials across a 2’’ wafer. It has an easy-access hinged lid for material and sample loading as well as a simple plug-and-play design and a touchscreen HMI. Its sleek, metallic chamber allows for easy cleaning as well as providing a striking aesthetic look for your lab, no matter how many deposition runs have been run, thanks to a sample and viewport shutter mechanism.  

The turbo pumped chamber can reach low 10E-6 mbar pressures, allowing it to facilitate more applications than the average benchtop coater. High-quality films can be fabricated using the HEX Mini for use in materials research, optical coatings, metal contacts, SEM sample preparation or TCO generation. 

Options 

The HEX Mini comes in two different configurations – The HEX Mini-S is the desktop sputter coater, designed with a 2’’ cooled magnetron head and 2’’ rotating sample stage for uniform deposition of simple metals and conductive materials via DC sputtering.  

The HEX Mini-T is configured with a 720W thermal evaporation source and a top-loaded 2’’ rotating sample stage, to make a true benchtop thermal evaporation system, ideally configured for metal evaporation and metal contact generation.  

The choice of both systems is completely dependent on the sample sensitivity, desired deposition yield and type of deposition material.  Both systems are designed for complete user control, while maintaining the compact, easy use of a benchtop PVD system.