What is Electron Beam (E-Beam) evaporation?
Electron beam (e-beam) evaporation is a physical vapour deposition (PVD) technique that uses a focused beam of high-energy electrons to vaporise a source material. It is particularly valued for its ability to deposit high melting point materials with excellent purity and precise control, making it a popular choice for demanding research and device fabrication applications.
How does E-Beam evaporation work?
In an e-beam evaporation source, a heated filament emits electrons, which are accelerated through a high voltage and steered using magnetic fields onto the surface of the source material. The source material sits in a water-cooled crucible, often called a hearth. The intense, localised energy delivered by the electron beam rapidly heats and vaporises the material, while the water-cooled crucible itself remains cool. The resulting vapour travels in a line-of-sight path to the substrate, where it condenses to form a thin film.