Glovebox Integration

Integrating your HEX Series system into a glovebox is crucial when working with air-sensitive materials. The HEX Series’ unique modularity allows this to be done differently from conventional PVD systems.

Gloveboxes are inert environments, usually filled with argon, wherein air-sensitive materials can be stored and worked on. Researchers may wish to integrate their PVD chamber into a glovebox if they wish to work with organic substrates or volatile metals like lithium.

Conventional PVD glovebox integration involves placing the PVD chamber directly inside a glovebox, which can take up a huge amount of room and present contamination risks. One of the primary benefits of the design of the HEX Series is that all systems (HEX, HEX-L & HEX-XL) can instead be integrated into a glovebox through the floor. 

This different approach minimises the space taken up inside the glovebox, as well as providing easy access to substrates. Additionally, the fact that the chamber panels of the HEX series sit below the glovebox means that any chamber cleaning can be carried out easily and without contaminating the glovebox. This integration process does not need to be performed upon purchase of a system; the chamber can be integrated and/or removed from the glovebox at any point after purchase.

Integration could also be done through the front-loading door of your HEX-L/XL. This design works great for loading air-sensitive deposition materials. Both options are available for our larger systems. 

Lastly, our load-lock assemblies are compatible with glovebox interfaces, and so samples can be loaded directly to the load-lock from the glovebox, improving the overall throughput of the system.